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Plasma CVD & PVD Production Technique by Dry Processes
Loading the Pressure-Gradient-type Arc Discharge Cathode
Use of Pressure-Gradient-type Arc Discharge Cathode has made possible making all sorts of Silicon coat such as Si, SiO2,SiN, SiC and processing thick coat more than 10 micron.
| Products: |
CVD process
PVD process
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Arc Discharge Plasma |
| Features: |
Thick Silicone coating can be obtained at high speed by CVD.
Can be applied to aluminum parts due to low operating temperature.
(less than 200 Celsius)
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| Applications: |
Prevent from contamination of holder and protection board in the semiconductor manufacturing equipment. |
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